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[snf-TeamDep] Thin Films report

Jim Haydon jhaydon at stanford.edu
Wed Jun 5 09:31:11 PDT 2013


*/Good morning All.. /*//

*_New Issues_*:AW-610 Forming gas issue was caused by recipe option that 
allowed the forming gas to continue running after the end of process. 
Corrections for this option will be made on all recipes but it may take 
some time.*__*

*//*

*General Information/Lab Activities*

	

*Wednesday, June 05, 2013***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Fiji -2

	

PROBLEM

	

4

	

Chuck temperature issue

	

Intlvac-Evap

	

PROBLEM

	

3

	

Being qualified

	

Setting up thermal recipes

Innotec

	

PROBLEM

	

1

	

Carouselrotation

	

Will look at alignment

STSdep

	

PROBLEM

	

2

	

Rf problem mixed frequency

	

	

	

	

	

	

	

	

	

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