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[snf-TeamDep] Thin films report

Jim Haydon jhaydon at stanford.edu
Thu Jun 13 08:29:01 PDT 2013


*/Good morning All.. /*//

*_New Issues_*:

*//*

*General Information/Lab Activities*

	

*Thursday, June 13, 2013***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Fiji -2

	

PROBLEM

	

4

	

Chuck temperature issue

	

E-box scheduled for replacementtoday

Intlvac-Evap

	

PROBLEM

	

3

	

Being qualified for other metals

	

Work being done

Innotec

	

PROBLEM

	

1

	

Intermittent leak

	

I will schedule a shut down to look at gun

STSdep

	

PROBLEM

	

2

	

Rf problem mixed frequency

	

I will talk to Jim M

wbslicide

	

PROBLEM

	

5

	

Bathneeds to be decond

	

	

	

	

	


	
	
	
	
	

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