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[snf-TeamDep] Thin Films report

Jim Haydon jhaydon at stanford.edu
Tue Jun 18 08:47:23 PDT 2013


*/Good morning All.. /*//

*_New Issues_*

*//*

*General Information/Lab Activities*

	

*Tuesday, June 18, 2013***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

	

	

	

Intlvac-Evap

	

PROBLEM

	

3

	

Being qualified

	

Innotec

	

PROBLEM

	

2

	

Pressure burst issues

	

I will schedule a shutdown to investigate/fix problem

STSdep

	

PROBLEM

	

6

	

RF problem mixed frequency

	

	

	

	

	

AW610

	

DOWN

	

1

	

Water leak

	

Removed for repair and modification

Intlvac-sputter

	

DOWN

	

7

	

Target conditioning

	

Maurice is working on issue

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