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[snf-TeamDep] Thin Films report

Jim Haydon jhaydon at stanford.edu
Fri Jun 21 08:37:38 PDT 2013


*/Good morning All.. /*//

*_New Issues_*

*//*

*General Information/Lab Activities*

	

*Friday, June 21, 2013***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

CPD

	

DOWN

	

2

	

Low pressure in chamber

	

Looking at problem

In contact with vendor

Intlvac-Evap

	

PROBLEM

	

7

	

Being qualified

	

Innotec

	

PROBLEM

	

3

	

Pressure burst issues

	

I will schedule a shutdown to investigate/fix problem

STSdep

	

PROBLEM

	

5

	

RF problem mixed frequency

	

	

	

	

	

AW610

	

DOWN

	

4

	

Water leak

	

Removed for repair and modification

Intlvac-sputter

	

DOWN

	

6

	

Target conditioning

	

Maurice is working on issue

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