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[snf-TeamDep] Thin Films report

Jim Haydon jhaydon at stanford.edu
Fri Jun 28 07:11:53 PDT 2013


*/Good morning All.. /*//

*_New Issues _*

*/No pressure burst issues in the Innotec have been recorded in the last 
couple of weeks so I will put off looking for something that's not there./*

*General Information/Lab Activities*

	

*Friday, June 28, 2013***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

	

	

	

Intlvac-Evap

	

PROBLEM

	

3

	

Being qualified

	

	

	

	

	

STSdep

	

PROBLEM

	

5

	

RF problem mixed frequency

	

Jim M working on problem

Wbgen2-rfx

	

DOWN

	

4

	

Bathremoved

	

	

	

	

	

Intlvac-sputter

	

DOWN

	

6

	

Target conditioning

	

Maurice is working on issue

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