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[snf-TeamDep] Thin Films Report

Jim Haydon jhaydon at stanford.edu
Tue Apr 1 07:20:15 PDT 2014


*/Good morning All.. /*//

*_New Issues_*:

*//*

*General Information/Lab Activities*

	

*Tuesday, April 01, 2014***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Wbgen2-RFX

	

PROBLEM

	

X

	

Porous tank installed

	

Will be removed at the end of project

No date has been set

Intlvac-Evap

	

DOWN

	

1

	

Being reworked

	

Most of the changes are done and hope to have it ready for testing by 
week03/31

u-etch

	

PROBLEM

	

2

	

Possibly out of vHF

	

New bottle has been ordered and will be here today

Intlvac-sputter

	

PROBLEM

	

5

	

Dead DC gun

	

Sending it out for rebuild

Savannah

	

PROBLEM

	

4

	

Leaking valve

	

Will replace valveat next opportunity

Fiji-1

	

PROBLEM

	

3

	

Leaking transfer valve

	

Will be replaced 4/2

	

	

	

	

	

	

	

	

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