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[snf-TeamDep] Thin Films Report

Jim Haydon jhaydon at stanford.edu
Tue Apr 15 06:51:18 PDT 2014


*/Good morning All.. /*//

*_New Issues_*:

*//*

*General Information/Lab Activities*

	

*Tuesday, April 15, 2014***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Wbgen2-RFX

	

PROBLEM

	

X

	

Porous tank installed

	

Will be removed at the end of project

No date has been set

Intlvac-Evap

	

DOWN

	

4

	

Being reworked

	

Most of the changes are done and hope to have it ready for testing by 
week03/31

u-etch

	

DOWN

	

2

	

Problems with regulator and pressure switch/gauge and valve

	

Regulator and switch have been installed should be up later today

Intlvac-sputter

	

DOWN

	

1

	

Dead DC gun and RF gun

	

RF gun installed and working

Savannah

	

PROBLEM

	

3

	

Leaking valve

	

Will replace valveat next opportunity

AW610-R

	

DOWN

	

11

	

Dirty chamber and TC needs calibration

	

Chamber will be changed today and TC will be calibrated

	

	

	

	

	

	

	

	


	
	
	
	
	

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