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[snf-TeamDep] Thin Films Report

Jim Haydon jhaydon at stanford.edu
Thu Apr 17 08:41:33 PDT 2014


*/Good morning All.. /*//

*_New Issues_*:

*//*

*General Information/Lab Activities*

	

*Wednesday, April 16, 2014***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Wbgen2-RFX

	

PROBLEM

	

X

	

Porous tank installed

	

Will be removed at the end of project

No date has been set

Intlvac-Evap

	

DOWN

	

4

	

Being reworked

	

Working on WIFI connection to Intlvac to resolve computer problems

	

	

	

	

Intlvac-sputter

	

PROBLEM

	

2

	

1 Dead DC gun

	

RF gun installed and working

1 DC gun working (dep rate with one gun same as two guns)

Savannah

	

PROBLEM

	

3

	

Leaking valve

	

Will replace valveat next opportunity

AW610-R

	

DOWN

	

11

	

System over heated and melted some parts

	

The system will be down at least a week I will need to order some parts

AW610-L

	

CHANGE

	

X

	

Temporally converted to contaminated RTA

	

Should be returned to clean ina week or two

	

	

	

	


	
	
	
	
	

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