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[snf-TeamDep] Thin Films report

Jim Haydon jhaydon at stanford.edu
Wed Apr 23 12:36:48 PDT 2014


*/Good morning All.. /*//

*_New Issues_*:

*//*

*General Information/Lab Activities*

	

*Wednesday, April 23, 2014***

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Wbgen2-RFX

	

PROBLEM

	

X

	

Porous tank installed

	

Will be removed at the end of project

No date has been set

Intlvac-Evap

	

DOWN

	

4

	

Being reworked

	

Working on WIFI connection to Intlvac to resolve computer problems

	

	

	

	

Intlvac-sputter

	

PROBLEM

	

4

	

1 Dead DC gun

	

RF gun installed and working

1 DC gun working (dep rate with one gun same as two guns)

Savannah

	

PROBLEM

	

3

	

Leaking valve

	

Will replace valveat next opportunity

AW610-R

	

DOWN

	

11

	

System over heated andmelted some parts

	

The system will be down at least a week Parts have been received

AW610-L

	

CHANGE

	

X

	

Temporally converted to contaminated RTA

	

Should be returned to clean ina week or two

WBclean-2

	

PROBLEM

	

5

	

Dead hotpot

	

New hotpot I hope to install 4/24/14


	
	
	
	
	

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