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[snf-HotTeam] Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Oct 19 07:58:17 PDT 2012


Good Morning All,
Ted is out today.
*1. New issues:Thermco Nitride slow pumping speed. LPCVD silane off due 
to sensor fault.
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride  
tested again waiting further instructions after alarms,  working on 
Badger interlocks,Epi regulator   assy installed but transducer readout 
not compatible
*3.  Resolved *: TLC on Thermco 3,4 tested OK no alarms

					
	Date: 	10/19/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm,testing more* 
*28.5/30* 	** 	**
Tylan 11-LTO 	*down*
	** 	*0/30* 	** 	**
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*up* 	***TLC test was fine* 	** 	** 	**
Thermco4 	
	*TLC test was good
* 	** 	** 	**
Thermco Poly1 	*down*
	** 	** 	*
* 	**
Thermco Poly2 	*down*
	** 	** 	** 	**
Thermco Nitride1 	*yellow*
	* High back pressure during dep
* 	** 	** 	**
Thermco bpsg 	*down*
	** 	** 	** 	**
AMAT Epi Cham. A 	*down* 	*Regulator assy replaced transducer readout 
issue* 	** 	** 	**
AMAT Epi Cham. B 	*down* 	*waiting for permit-drawings with John 
B* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**

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