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[snf-HotTeam] Diffusion Morning Report 10/26/12

Ted Berg tberg at stanford.edu
Fri Oct 26 06:18:50 PDT 2012


Good Morning All,
*1. New issues: Thermco Nitride problems, paeticles on back of Epi 
wafers, FGA boat issues?
* *2. Ongoing issues:*Tylan Poly rewriting recipes,** Tylannitride  
tested again waiting further instructions after alarms,  working on 
Badger interlocks,Epi regulator  assy installed but still 
creeps,*Thermco Nitride slow pumping speed. *
*3.  Resolved *:
					
	Date: 	10/26/12 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*14.39/30* 	** 	**
Tylan 8-SiGe 	*down* 	*waiting for users* 	*3.4/30* 	** 	**
Tylan 9-Poly 	*down* 	*rewriting recipes-testing revised recipes* 
*23.7/30* 	** 	**
Tylan 10-Nitride 	*down* 	*tested after sih4 alarm,testing more* 
*28.5/30* 	** 	**
Tylan 11-LTO 	*up* 	** 	*0/30* 	** 	**
Tylan 12-FGA 	*yellow* 	*boat issue?* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*up* 	** 	** 	** 	**
Thermco4 	*up* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	*
* 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*yellow* 	*slow pumping speed-poor uniformity* 	** 
** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi Cham. A 	*yellow* 	*replacing Reg assy today-particles on 
back* 	** 	** 	*1*
AMAT Epi Cham. B 	*down* 	*waiting for permit-drawings with Aaron at 
SUFMO* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
SEM 4160 	*up* 	** 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	*on* 	*crossover ok* 	***changeover working 
well*** 	** 	**


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