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[snf-HotTeam] Diffusion Morning Report 10/09/14

Ted Berg tberg at stanford.edu
Thu Oct 9 05:43:04 PDT 2014


Good Morning All,
     MOCVD  startup moving along. Meeting on Epi HazeYesterday plan to 
follow. New gas panel to replace FGA2 is here and being installed. PWS 
bank leaving the end of this month. Tylan bank 1 leaving Nov.

Diffusion Morning Report*October 9, 2014*

*New Problems: Epi scrubber fault*

*Ongoing: TLC flow issues on Thermco 3 ,Tylan 2 H2 flow issues, Tylan 3 
flow issues, Epi Hazy Ge, Thermco Poly1 pressure issues*

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*Thermco 3*

	

yellow

	

	

Tlc issues

	

checkout

*Thermco Poly 2*

	

Yellow

	

	

Chamber OT

	

Overtemp Phantom error

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco BPSG*

	

Yellow

	

	

Front zone colder

	

Check element

*Tylan 2*

	

Down

	

	

No H2

	

Checkout

*AMAT Epi ChA *

	

Yellow

	

	

Hazy Ge

	

Scrubber fault

*Tylan 3*

	

Down

	

	

No H2/flow issues

	

*Thermco Poly1*

	

Yellow

	

	

Pressure rise

	


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