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[snf-HotTeam] Diffusion Morning Report 10/15/14

Ted Berg tberg at stanford.edu
Wed Oct 15 06:13:07 PDT 2014


Good Morning All,
     LOts of issues this morning.Epi Testing. PWS bank leaving end of 
the month. Tylan bank 1 leaving in November.

Diffusion Morning Report*October 15, 2014*

*New Problems: None overnight*

*Ongoing: TLC flow issues on Thermco 3 ,Tylan 2 H2 flow issues, Tylan 3 
flow issues, Epi Hazy Ge, Thermco Poly1 pressure issues, Tylan Nitride 
pump bad, Tylan LTO no O2*

*Resolved: epi A scrubber problem*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*Thermco 3*

	

yellow

	

	

Tlc issues

	

checkout

*Thermco Poly 2*

	

Yellow

	

	

Chamber OT

	

Overtemp Phantom error

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

No O2

*Thermco BPSG*

	

Yellow

	

	

Front zone colder

	

Check element

*Tylan 2*

	

Down

	

	

No H2

	

Checkout

*AMAT Epi ChA *

	

Yellow

	

	

Hazy Ge

	

*Tylan 3*

	

Down

	

	

No H2/flow issues

	

*Thermco Poly1*

	

Yellow

	

	

Pressure rise

	

*Tylan Nitride*

	

*down*

**

	

**

	

*Pump bad*

	

*Pump replaced trouble shooting*

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