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[snf-HotTeam] Diffusion Morning Report 10/23/14

Ted Berg tberg at stanford.edu
Thu Oct 23 06:12:07 PDT 2014


Sorry,
     I forgot status

On 10/23/2014 6:11 AM, Ted Berg wrote:
> Good Morning All,
>     It now looks like PWS and Tylan bank 3 will be leaving Mid to late 
> Nov. Tylan 9 testing.

Diffusion Morning Report*October 23, 2014*

*New Problems: None over night*

*Ongoing: TLC flow issues on Thermco 3 ,Tylan 2 H2 flow issues, Tylan 3 
flow issues, Epi Hazy Ge, Tylan Nitride*

*Resolved: *

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*Thermco 3*

	

yellow

	

	

Tlc issues

	

checkout

*Thermco Poly 2*

	

Yellow

	

	

Chamber OT

	

Overtemp Phantom error

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco BPSG*

	

Yellow

	

	

Front zone colder

	

Check element

*Tylan 9*

	

Down

	

	

testing

	

Waiting forming gas

*AMAT Epi ChA *

	

Yellow

	

	

Hazy Ge

	

Testing

*Tylan 3*

	

Down

	

	

No H2/flow issues

	

going

*Tylan Nitride*

	

Down

	

	

Pumping issues

	

Pump will be changed again

*BBr3*

	

*Down*

**

	

**

	

*Removed*

	

**

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