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[snf-HotTeam] Diffusion Morning Report 10/29/14

Ted Berg tberg at stanford.edu
Wed Oct 29 06:26:20 PDT 2014


Good Morning All,
     PWS bank and Tylan bank 1 leaving mid to late Nov.

Diffusion Morning Report*October 29, 2014*

*New Problems: Epi over pressure*

*Ongoing: TLC flow issues on Thermco 3, Epi Hazy Ge, Tylan Nitride leak*

*Resolved: Tylan LTO wont vent*

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

*Thermco 3*

	

yellow

	

	

Tlc issues

	

checkout

*Thermco Poly 2*

	

Yellow

	

	

Chamber OT

	

Overtemp Phantom error

*Tylan 11-LTO*

	

Yellow

	

	

LEDs

	

*Thermco BPSG*

	

Yellow

	

	

Front zone colder

	

Check element

*Tylan Nitride*

	

Down

	

	

LEAK

	

REPLACING TUBE

*AMAT Epi ChA *

	

Yellow

	

	

Hazy Ge

	

CH A over pressure


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