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[snf-HotTeam] Diffusion Morning Report 05/15/15

Ray Seymour rseymour at stanford.edu
Fri May 15 05:47:49 PDT 2015




  Good Morning All,
   Ted is out today

Diffusion Morning Report*May 15, 2015*

*New Problems: EPI B wafer load, 1% Diborane getting low (19 psi) reset 
settings.*

*Ongoing: TLC flow issues on Thermco 3*

*Resolved: Epi B possible recipe issues*

	

**

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

**

*Thermco 3*

	

yellow

	

	

Tlc issues

	

checkout

	

*Thermco 1*

	

yellow

	

	

*Long stab time*

	

	

	

	

	

**

	

	

*Thermco 2*

	

Yellow

	

	

*Thin*

	

	






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