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[snf-HotTeam] Diffusion Morning Report 05/01/17

Ted C. Berg tberg at stanford.edu
Mon May 1 06:11:44 PDT 2017


Good Morning All,

Diffusion Morning ReportMay 1, 2017

*New Problems: Thermco LTO Uniformity*

*Ongoing: Epi A pressure issues, *

*Resolved:*

	

**

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

**

*AMAT Epi Cham A*

	

Yellow

	

	

Pump issues

	

Testing Pump

	

*Epi Ch B*

	

down

	

	

*Planned shutdown*

	

	

*Thermco LTO*

	

Yellow

	

	

Uniformity

	

Checkout

	

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