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[snf-HotTeam] Diffusion Morning Report 05/05/17

Ted C. Berg tberg at stanford.edu
Fri May 5 05:41:53 PDT 2017


Happy Cinco de Mayo,

Diffusion Morning ReportMay 5, 2017

*New Problems: None overnight*

*Ongoing: Epi A pressure issues, Thermco LTO Uniformity, TEOS pumping, 
CNT heat exchanger*

*Resolved: Epi DC motorhardware interlock*

	

**

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

**

*AMAT Epi Cham A*

	

Yellow

	

	

Pump issues

	

Testing Pump

	

*Epi Ch B*

	

down

	

	

*Planned shutdown*

	

	

*Thermco LTO*

	

Yellow

	

	

Uniformity

	

Checkout

	

TEOS

	

Yellow

	

	

Pumping slowly

	

Checkout

	

CNT

	

Down

	

	

Heat exchanger

	

  Parts ordered

	

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