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[snf-HotTeam] Diffusion Morning Report 05/31/17

Ted C. Berg tberg at stanford.edu
Wed May 31 05:52:08 PDT 2017


Good Morning All,

Diffusion Morning ReportMay31, 2017

*New Problems: None overnight,Thermco 1low dep rate possible due to H2 issue
*

*Ongoing: Epi A pressure issues, Thermco LTO Uniformity, TEOS test, SEM 
lost position*

*Resolved: *

	

**

*Tools*

**

	

*Status*

**

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

	

**

*AMAT Epi Cham A*

	

Yellow

	

	

Pump issues

	

Testing Pump

	

*Epi Ch B*

	

down

	

	

*Planned shutdown*

	

	

*Thermco LTO*

	

Yellow

	

	

Uniformity

	

Checkout

	

TEOS

	

Yellow

	

	

Needs test after repair

	
	

SEM 4160

	

Down

	

	

Stage lost position

	

Waiting FS, bad 12v Power supply

	

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