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[snf-lithography] Morning Litho Status 8/6/2014
Gary J Sosa
gsosa at stanford.edu
Wed Aug 6 08:06:11 PDT 2014
Good morning All..
EVBonder - Voltage cut off during process
General Information/Lab Activities
Wednesday, August 06, 2014
Mahnaz - Extended shift coverage today. Hours: 10am – 7:oopm
Up with no restrictions.
Receive indexer problem
Still under investigation. Please check Badger for status change.
Overcurrent and loss of wafer vacuum
Need to investigate
Voltage cut off during process
Needs further testing
Monitor not working
Arranging a field service visit to repair.
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