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[snf-lithography] Morning Litho Status 8/6/2014

Gary J Sosa gsosa at stanford.edu
Wed Aug 6 08:06:11 PDT 2014


Good morning All.. 
New Issues 
EVBonder - Voltage cut off during process 
	
General Information/Lab Activities 	
Wednesday, August 06, 2014 
	
Mahnaz - Extended shift coverage today. Hours: 10am – 7:oopm 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	

	
Up with no restrictions. 	

	
SVGCoat 	
PROBLEM 	
4 
	
Receive indexer problem 	

	
BlueM Oven 	
DOWN 	
2 
	
Oven contaminated 	
Still under investigation. Please check Badger for status change. 
	
Karlsuss2 	
DOWN 	
1 
	
Overcurrent and loss of wafer vacuum 	
Need to investigate 
	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
	
Voltage cut off during process 	
Needs further testing 
	
Nanospec 	
DOWN 	
3 
	
Monitor not working 	
Arranging a field service visit to repair. 
	
	
	
	
	
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