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[snf-lithography] Morning Litho Status 8/7/2014
Gary J Sosa
gsosa at stanford.edu
Thu Aug 7 11:15:27 PDT 2014
Good morning All..
New Issues
None-
General Information/Lab Activities
Thursday, August 07, 2014
Gary - Extended shift coverage today. Hours: 10:00am – 7:00pm
Tool
Status
Priority
Problem/Comment
Action Plan/Update
ASML Stepper
UP
Up with no restrictions.
SVGCoat
PROBLEM
5
Receive indexer problem
BlueM Oven
DOWN
3
Oven contaminated
Still under investigation. Please check Badger for status change.
Karlsuss2
DOWN
1
Cannot power up.
Ordering new emergency switch contactor
Miscellaneous
EVBonder
DOWN
4
Voltage cut off during process
Testing in progress
Nanospec
DOWN
2
Monitor not working/CPU problems
Sending computer to vendor for diagnosis and repair
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