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[snf-lithography] Morning Litho Status 8/8/2014

Gary J Sosa gsosa at stanford.edu
Fri Aug 8 07:58:14 PDT 2014


Good morning All.. 
New Issues 
None- 
	
General Information/Lab Activities 	
Friday, August 08, 2014 
	
ASML Stepper - UV lamp change in progress 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Up with no restrictions. 	

	
SVGCoat 	
PROBLEM 	
5 	
Receive indexer problem 	

	
BlueM Oven 	
DOWN 	
2 	
Oven contaminated 	
Still under investigation. Please check Badger for status change. 
	
Karlsuss2 	
DOWN 	
1 	
Cannot power up. 	
New contactor switch ordered. ETA 8/8 or 8/11 
	
Miscellaneous 	
	
	
	

	
EVBonder 	
DOWN 	
3 	
Voltage cut off during process 	
Testing in progress 
	
Nanospec 	
DOWN 	
4 	
Monitor not working/CPU problems 	
Computer sent out to vendor for diagnosis and repair 
	
	
	
	
	
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