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[snf-lithography] Morning Litho Status 8/11

Gary J Sosa gsosa at stanford.edu
Mon Aug 11 08:08:57 PDT 2014


Good morning All.. 
New Issues 
None- 
	
General Information/Lab Activities 	
Monday, August 11, 2014 
	




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Up with no restrictions. 	

	
SVGCoat 	
PROBLEM 	
5 	
Receive indexer problem 	
Will replace indexer when our spare returns from repair. 
	
BlueM Oven 	
DOWN 	
2 	
Oven contaminated 	
Still under investigation. Please check Badger for status change. 
	
Karlsuss2 	
DOWN 	
1 	
Cannot power up. 	
New contactor switch ordered. ETA 8/11 
	
Miscellaneous 	
	
	
	

	
EVBonder 	
DOWN 	
3 	
Voltage cut off during process 	
Still troubleshooting 
	
Nanospec 	
DOWN 	
4 	
Monitor not working/CPU problems 	
Vendor verified that computer is OK. Shipping back computer and a monitor. ETA: 8/12 OR 8/13 
	
	
	
	
	
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