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[snf-lithography] Morning Litho Status 8/13/2014

Gary J Sosa gsosa at stanford.edu
Wed Aug 13 07:33:31 PDT 2014


Good morning All.. 
New Issues 
SVGCoat2- User reports a centering device problem 
	
General Information/Lab Activities 	
Wednesday, August 13, 2014 
	
EVG Spraycoater- Converting to 6” wafer size today, as per user request. Will convert back to 4” wafer size tomorrow morning 

Mahnaz - extended shift coverage today . Hours: 10:00am to 7:00pm 

	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Stepper up with no restrictions 	
3D calibration completed on 8/12. System is up for frontside and 3D align 
	
SVGCoat 	
PROBLEM 	
4 	
Receive indexer problem 	
Will replace indexer when our spare returns from repair. 
	
Karlsuss2 	
PROBLEM 	
2 	
Need to verify alignment 	

	
SVGCoat2 	
DOWN 	
1 	
Centering device problem 	
Need to investigate 
	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Voltage cut off during process 	
High voltage cable is damaged. Ordering a new HV cable from EVG. 
	
	
	
	
	

	
	
	
	
	
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