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[snf-lithography] Morning Litho Status 8/13/2014
Gary J Sosa
gsosa at stanford.edu
Wed Aug 13 07:33:31 PDT 2014
Good morning All..
SVGCoat2- User reports a centering device problem
General Information/Lab Activities
Wednesday, August 13, 2014
EVG Spraycoater- Converting to 6” wafer size today, as per user request. Will convert back to 4” wafer size tomorrow morning
Mahnaz - extended shift coverage today . Hours: 10:00am to 7:00pm
Stepper up with no restrictions
3D calibration completed on 8/12. System is up for frontside and 3D align
Receive indexer problem
Will replace indexer when our spare returns from repair.
Need to verify alignment
Centering device problem
Need to investigate
Voltage cut off during process
High voltage cable is damaged. Ordering a new HV cable from EVG.
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