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[snf-lithography] Morning Litho Status 8/15/2014
Gary J Sosa
gsosa at stanford.edu
Fri Aug 15 08:02:37 PDT 2014
Good morning All..
SVGCoat2- User reports a wafer broke in the spinner bowl
General Information/Lab Activities
Friday, August 15, 2014
Mahnaz - Vacation today(8/15)
Stepper up with no restrictions
Receive indexer problem
Will replace indexer when our spare returns from repair.
Need to verify alignment
Wafer broke in spinner
Need to investigate
Voltage cut off during process
High voltage cable is damaged. New cable is on order
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