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[snf-lithography] Morning Litho Status 8/20/2014
Gary J Sosa
gsosa at stanford.edu
Wed Aug 20 07:50:53 PDT 2014
Good morning All..
SVGCoat2- User reports a top EBR problem
General Information/Lab Activities
Wednesday, August 20, 2014
Mahnaz - Extended shift coverage today. Hours: 10:00am – 7:00pm
Up with no restrictions.
Receive indexer problem
Will replace indexer when our spare returns from repair.
Top EBR problem
Need to investigate
Voltage cut off during process
New high voltage cable is on order
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