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[snf-lithography] Morning Litho Status 8/20/2014

Gary J Sosa gsosa at stanford.edu
Wed Aug 20 07:50:53 PDT 2014


Good morning All.. 
New Issues 
SVGCoat2- User reports a top EBR problem 
	
General Information/Lab Activities 	
Wednesday, August 20, 2014 
	
Mahnaz - Extended shift coverage today. Hours: 10:00am – 7:00pm 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Up with no restrictions. 	

	
SVGCoat 	
PROBLEM 	
2 	
Receive indexer problem 	
Will replace indexer when our spare returns from repair. 
	
SVGCoat2 	
	
1 	
Top EBR problem 	
Need to investigate 
	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Voltage cut off during process 	
New high voltage cable is on order 
	
	
	
	
	

	
	
	
	
	
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