[snf-lithography] Morning Litho Status 8/27/2014

[Gary J Sosa]

Good morning All.. 
New Issues 
None- 
	
General Information/Lab Activities 	
Wednesday, August 27, 2014 
	
Uli - On vacation from 8/25/14 through 9/8/2014 
Mahnaz- Extended shift coverage today. Hours 10:00am – 7:00pm 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Up with no restrictions. 	

	
SVGCoat 	
PROBLEM 	
2 	
Receive indexer problem 	
Will replace indexer when our spare returns from repair. 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Voltage cut off during process 	
New high voltage cable is on order 
	
Woollam 	
DOWN 	
1 	
Cannot start lamp. 	
The M2000 module is at Woollam for evaluation and repair 
	
	
	
	
	
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