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[snf-lithography] Morning Litho Status 8/27/2014
Gary J Sosa
gsosa at stanford.edu
Wed Aug 27 08:06:54 PDT 2014
Good morning All..
New Issues
None-
General Information/Lab Activities
Wednesday, August 27, 2014
Uli - On vacation from 8/25/14 through 9/8/2014
Mahnaz- Extended shift coverage today. Hours 10:00am – 7:00pm
Tool
Status
Priority
Problem/Comment
Action Plan/Update
ASML Stepper
UP
Up with no restrictions.
SVGCoat
PROBLEM
2
Receive indexer problem
Will replace indexer when our spare returns from repair.
Miscellaneous
EVBonder
PROBLEM
3
Voltage cut off during process
New high voltage cable is on order
Woollam
DOWN
1
Cannot start lamp.
The M2000 module is at Woollam for evaluation and repair
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