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[snf-lithography] Morning Litho Status 8/28/2014

Gary J Sosa gsosa at stanford.edu
Thu Aug 28 07:34:43 PDT 2014


Good morning All.. 
New Issues 
ASML Stepper- Wafers stuck in the system 
Spraycoater - Not dispensing chemicals 
	
General Information/Lab Activities 	
Thursday, August 28, 2014 
	
Uli - On vacation from 8/25/14 through 9/8/2014 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
DOWN 	
1 	
Wafer transfer error from Pre-aligner to Dipod 	
Will recover wafers ant test system 
	
SVGCoat 	
PROBLEM 	
4 	
Receive indexer problem 	
Will replace indexer when our spare returns from repair. 
	
EVGSpraycoat 	
DOWN 	
2 	
Not dispensing 
	
Will investigate 

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
5 	
Voltage cut off during process 	
New high voltage cable is on order 
	
Woollam 	
DOWN 	
3 	
Cannot start lamp. 	
Lamp power supply in the M2000 module replaced. Woollam will finish testing and ship module back today. 
	
	
	
	
	
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