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[snf-lithography] Morning Litho Status 8/28/2014
Gary J Sosa
gsosa at stanford.edu
Thu Aug 28 07:34:43 PDT 2014
Good morning All..
ASML Stepper- Wafers stuck in the system
Spraycoater - Not dispensing chemicals
General Information/Lab Activities
Thursday, August 28, 2014
Uli - On vacation from 8/25/14 through 9/8/2014
Wafer transfer error from Pre-aligner to Dipod
Will recover wafers ant test system
Receive indexer problem
Will replace indexer when our spare returns from repair.
Voltage cut off during process
New high voltage cable is on order
Cannot start lamp.
Lamp power supply in the M2000 module replaced. Woollam will finish testing and ship module back today.
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