Search Mailing List Archives


Limit search to: Subject & Body Subject Author
Sort by: Reverse Sort
Limit to: All This Week Last Week This Month Last Month
Select Date Range     through    

[snf-lithography] Morning Litho Status 8/29/2014

Gary J Sosa gsosa at stanford.edu
Fri Aug 29 07:41:25 PDT 2014


Good morning All.. 
New Issues 
ASML Stepper- Wafers stuck in the system 
	
General Information/Lab Activities 	
Friday, August 29, 2014 
	
Uli - On vacation from 8/25/14 through 9/8/2014 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
DOWN 	
1 	
Wafer transfer/vacuum error at E-table 	
Will recover wafers ant test system 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Voltage cut off during process 	
New high voltage cable is on order 
	
Woollam 	
DOWN 	
2 	
Cannot start lamp. 	
Lamp power supply in the M2000 module replaced. Awaiting delivery of M2000 module. 
	
	
	
	
	
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://mailman.stanford.edu/pipermail/snf-lithography/attachments/20140829/42878ca2/attachment-0001.html>


More information about the snf-lithography mailing list