Search Mailing List Archives
[snf-lithography] Morning Litho Status 8/29/2014
Gary J Sosa
gsosa at stanford.edu
Fri Aug 29 07:41:25 PDT 2014
Good morning All..
ASML Stepper- Wafers stuck in the system
General Information/Lab Activities
Friday, August 29, 2014
Uli - On vacation from 8/25/14 through 9/8/2014
Wafer transfer/vacuum error at E-table
Will recover wafers ant test system
Voltage cut off during process
New high voltage cable is on order
Cannot start lamp.
Lamp power supply in the M2000 module replaced. Awaiting delivery of M2000 module.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the snf-lithography