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[snf-lithography] Litho Area AM Daily Report 2/10/14

Mario vilanova at stanford.edu
Mon Feb 10 06:47:46 PST 2014


*/Good morning All../*

*_New Issues_*

*/None-/*

*General Information/Lab Activities*

	

*Monday, February 10, 2014***

*/EE410 labs in progress/*. Please be advised that the EE410 classes 
have priority on the tools. Please observe and respect the tool 
reservations for these lab sessions.

*Gary Sosa -* */Out Sick Today :-(
/*

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

*/System is up with no restrictions/*

	

*//*

EVImprint

	

DOWN

	

	

Does not work as standard aligner. Suspect software or configuration

	

*/No actions planned at this time/*

P2

	

PROBLEM

	

1

	

Front 2 Legs are Not Floating

	

*/Need to investigate/*

KSCoat

	

PROBLEM

	

2

	

Up for 4" and 6" wafer processing

	

*//*

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