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[snf-lithography] Morning Litho Status 2/13/2014

Gary J Sosa gsosa at stanford.edu
Thu Feb 13 08:04:38 PST 2014


Good morning All.. 
New Issues 
None- 

	
General Information/Lab Activities 	
Thursday, February 13, 2014 
	
EE410 labs in progress . Please be advised that the EE410 classes have priority on the tools. Please observe and respect the tool reservations for these lab sessions. 

Mario - Out today(2/13) 
Gary - Out @ 3:00PM Today 



	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
Scheduled lamp change today 	

	
EVImprint 	
DOWN 	
	
Does not work as standard aligner. Suspect software or configuration 	
No actions planned at this time 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
KSCoat 	
PROBLEM 	
	
Up for 4” and 6” wafer processing 	

	
Hummer 	
PROBLEM 	
	
No Argon flow 	
Replaced TC gauge and meter with a suitable replacement because original parts are obsolete. Tested N2 and Argon functions-OK. System needs a process test. 
	
	
	
	
	
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