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[snf-lithography] Litho AM Daily Report 2/21/14

Mario vilanova at stanford.edu
Fri Feb 21 07:03:35 PST 2014


*/Good morning All../*

*_New Issues
Coat #2 Arm out of position ( already taken care of it )
_*

*CCH-HD*- User reports issue with Z position

*General Information/Lab Activities*

	

*Friday, February 21, 2014***

*/EE410 labs in progress/*. Please be advised that the EE410 classes 
have priority on the tools. Please observe and respect the tool 
reservations for these lab sessions.

*Gary Sosa *- Vacation  Out today(2/21)

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

*/Up with no restrictions/*

	

*//*

EVImprint

	

DOWN

	

	

Does not work as standard aligner. Suspect software or configuration

	

*/No actions planned at this time/*

	

	

	

	

*//*

	

	

	

	

	

	

	

	

Miscellaneous

	

	

	

	

KSCoat

	

PROBLEM

	

	

Up for 4" and 6" wafer processing

	

*//*

CCI-HD

	

PROBLEM

	

1

	

Z position problem

	

*//*

	

	

	

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