Search Mailing List Archives


Limit search to: Subject & Body Subject Author
Sort by: Reverse Sort
Limit to: All This Week Last Week This Month Last Month
Select Date Range     through    

[snf-lithography] Litho Am Daily Report 6/10/14

Mario vilanova at stanford.edu
Tue Jun 10 06:37:25 PDT 2014


*/Good morning All../*

*_New Issues_*

*/None-/*

*General Information/Lab Activities*

	

*Tuesday, June 10, 2014***

*Gary Sosa Out Today and Tomorrow 6/10/14 - 6/11/14*

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

Karlsuss2

	

PROBLEM

	

1

	

Intermittent WEC Z position problem

	

*/WEC problem still persists after DC motor and driver board 
replacement. Reseated connectors and PC boards. System under observation/*

KSCoat

	

DOWN

	

	

Cannot power up the system

	

*/Working with ASML, developing a strategy to retire the tool and remove 
from the lab./*

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://mailman.stanford.edu/pipermail/snf-lithography/attachments/20140610/46ffcb65/attachment.html>


More information about the snf-lithography mailing list