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[snf-lithography] Litho Am Daily Report 6/10/14

Mario vilanova at
Tue Jun 10 06:37:25 PDT 2014

*/Good morning All../*

*_New Issues_*


*General Information/Lab Activities*


*Tuesday, June 10, 2014***

*Gary Sosa Out Today and Tomorrow 6/10/14 - 6/11/14*










*Action Plan/Update*

ASML Stepper





System up with no restrictions









Intermittent WEC Z position problem


*/WEC problem still persists after DC motor and driver board 
replacement. Reseated connectors and PC boards. System under observation/*






Cannot power up the system


*/Working with ASML, developing a strategy to retire the tool and remove 
from the lab./*

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