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[snf-lithography] Morning Litho Status 6/13/2014

Gary J Sosa gsosa at stanford.edu
Fri Jun 13 07:53:52 PDT 2014


Good morning All.. 
New Issues 
EVBonder- Bond glass frame has a fracture 
Karlsuss - User reports that BSA microscopes are not moving 
ASML - User reports 1 of 6 wafers scratched during processing 
	
General Information/Lab Activities 	
Friday, June 13, 2014 
	
Mario - On vacation today(6/13) 
Mahnaz - On vacation today(6/13) 
Uli - On vacation today(6/13) 

EVBonder - Changing pressure plate from “Quartz” to “Steel” today 

	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
PROBLEM 	
3 	
User reports a wafer was scratched during processing. 	
Users’ description of problem indicates a potential wafer mapping and calibration issue at top half of cassette. Informed ASML field service on 6/12. FSE visit still TBD 
	
Karlsuss2 	
PROBLEM 	
5 	
Intermittent WEC Z position problem 	
WEC problem still persists after DC motor and driver board replacement. Reseated connectors and PC boards. System under observation 
	
Karlsuss 	
PROBLEM 	
2 	
BSA microscopes not moving in X direction 	
Need to investigate 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
4 	
Fracture in bond glass frame 	
Will replace the bond glass frame 
	
AFM2 	
DOWN 	
1 	
Data acquisition problems 	
James to do some basic troubleshooting and arrange field service visit, if needed 
	
	
	
	
	
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