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[snf-lithography] Morning Litho Status 6/16/2014

Gary J Sosa gsosa at stanford.edu
Mon Jun 16 07:43:04 PDT 2014


Good morning All.. 
New Issues 
Karlsuss - User reports that BSA microscopes are not moving 
	
General Information/Lab Activities 	
Monday, June 16, 2014 
	




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
System up with no restrictions 	

	
Karlsuss2 	
PROBLEM 	
3 	
Intermittent WEC Z position problem 	
WEC problem still persists after DC motor and driver board replacement. Reseated connectors and PC boards. System under observation 
	
Karlsuss 	
PROBLEM 	
2 	
BSA microscopes not moving in X direction 	
Need to investigate 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
	
	
	
	

	
AFM2 	
DOWN 	
1 	
Data acquisition problems 	
James to do some basic troubleshooting and arrange field service visit, if needed 
	
	
	
	
	
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