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[snf-lithography] Litho AM Report 6/19/14

Mario vilanova at stanford.edu
Thu Jun 19 06:42:15 PDT 2014


*/Good morning All../*

*_New Issues_*

/*Suss # 2 Back Side Microscopes are stuck again ( Ben Chui )
ASML - 3 Wafers stuck Inside Tool. ( Mahnaz)

*/

*General Information/Lab Activities*

	

*Thursday, June 19, 2014***

*Gary Sosa *- Extended shift coverage today. */Hours: 10:00am -- 7:00pm/*

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

Karlsuss1

	

PROBLEM

	

2

	BSA Scope is stuck again
	

*/ Initialize system and test it .
/*

  Karlsuss 2

	

PROBLEM

	

  3

	Intermittent WEC Z position problem 	

*//**/Intermittent WEC issue. System under observation/*

	

	

	

	

*//*

	

	

	

	

Miscellaneous

	

	

	

	

	

	

	

	

*//*

ASML

	

DOWN

	

1

	3 Wafers Stuck Inside
Tool .
	

/*We Will remove the wafers and visually Inspect them to see if
wafers are clean On the back.
*/

	

	

	

	



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