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[snf-lithography] Morning Litho Status 6/27/2014
Gary J Sosa
gsosa at stanford.edu
Fri Jun 27 07:24:57 PDT 2014
Good morning All..
Woollam- User reports noisy data
General Information/Lab Activities
Friday, June 27, 2014
System up with no restrictions
Slow water drip during rinse step only.
Need to find replacement valves
Anodic graphite had damage due to arcing
No Anodic bonding until graphite is repaired or replaced
Noisy data. Cooling fan noise
Need to investigate if fan noise is causing noisy data.
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