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[snf-lithography] Morning Litho Status 6/27/2014

Gary J Sosa gsosa at stanford.edu
Fri Jun 27 07:24:57 PDT 2014


Good morning All.. 
New Issues 
Woollam- User reports noisy data 
	
General Information/Lab Activities 	
Friday, June 27, 2014 
	




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
System up with no restrictions 	

	
SVGDev2 	
PROBLEM 	
2 	
Slow water drip during rinse step only. 	
Need to find replacement valves 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Anodic graphite had damage due to arcing 	
No Anodic bonding until graphite is repaired or replaced 
	
Woollam 	
PROBLEM 	
1 	
Noisy data. Cooling fan noise 	
Need to investigate if fan noise is causing noisy data. 
	
	
	
	
	
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