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[snf-lithography] Litho AM Report 11/4/14
vilanova at stanford.edu
Tue Nov 4 06:38:15 PST 2014
*/Good morning All../*
*ASML Stepper- *User ( Colby Bellew ) Reports that Software Froze .Need
*General Information/Lab Activities*
*Tuesday, November 04, 2014***
*Gary Sosa Out Sick today :-(
Software Froze while running wafers.
*/Need to investigate/*
Syringe sensor not working correctly
*/Ordering a new micro switch for the syringe holder./*
Voltage cut off during process
*/New high voltage cable is on order/*
Does not measure
Va/Vb ratio limit error
*/Tool is out for repair, It might take
2 weeks to get it back.
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