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[snf-lithography] Litho AM Report 11/4/14

Mario vilanova at stanford.edu
Tue Nov 4 06:38:15 PST 2014


*/Good morning All../*

*_New Issues_/-/*

*ASML Stepper- *User ( Colby Bellew ) Reports  that Software Froze .Need 
to Investigate

*General Information/Lab Activities*

	

*Tuesday, November 04, 2014***

*Gary Sosa Out Sick today :-(
*

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

PROBLEM

	

1

	

Software Froze while running wafers.

	

*/Need to investigate/*

EVGSpraycoat

	

PROBLEM

	

3

	

Syringe sensor not working correctly

	

*/Ordering a new micro switch for the syringe holder./*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

EVBonder

	

PROBLEM

	

5

	

Voltage cut off during process

	

*/New high voltage cable is on order/*

Zygo

	

DOWN

	

4

	

Does not measure

	

*/Still investigating/*

Prometrix

	

DOWN

	

2

	

Va/Vb ratio limit error

	

*/Tool is out for repair, It might take
2 weeks to get it back.
/*



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