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[snf-lithography] Morning Litho Status 11/7/2014

Gary J Sosa gsosa at stanford.edu
Fri Nov 7 07:49:51 PST 2014


Good morning All.. 
New Issues - 
None- 
	
General Information/Lab Activities 	
Friday, November 07, 2014 
	





	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
System up with no restrictions 	

	
EVGSpraycoat 	
PROBLEM 	
4 	
Syringe sensor not working correctly 	
Replacement microswitch on order 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Voltage cut off during process 	
New high voltage cable is on order. ETA 11/13/2014 
	
Zygo 	
DOWN 	
2 	
Does not measure 	
Still investigating 
	
Prometrix 	
DOWN 	
1 	
Va/Vb ratio limit error 	
Tool is out for repair 
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