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[snf-lithography] Morning Litho Status 11/10/2014
Gary J Sosa
gsosa at stanford.edu
Mon Nov 10 08:02:08 PST 2014
Good morning All..
New Issues -
ASML Stepper - User reports a wafer handling error
Nanospec2 - User reports a potential measurement issue
General Information/Lab Activities
Monday, November 10, 2014
Wafer handling not initialized
Need to investigate and recover system
Syringe sensor not working correctly
New switch ordered on 11/7. Should be delivered this week.
Voltage cut off during process
Received HV cable on 11/7. Will install and test
Does not measure
Va/Vb ratio limit error
Tool returned and re-installed on Friday. Ran multiple 49 point tests with no problem. Will continue to monitor
Need to investigate. May need to replace the reference wafer
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