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[snf-lithography] Morning Litho Status 11/11/2014

Gary J Sosa gsosa at stanford.edu
Tue Nov 11 07:53:26 PST 2014


Good morning All.. 
New Issues - 
None- 
	
General Information/Lab Activities 	
Tuesday, November 11, 2014 
	
Notice- The YES Oven will be offline and unavailable to labmembers today from 8:00am to 2:00pm. The scheduled work may finish early, so check Badger for current tool status. 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
System up with no restrictions 	

	
EVGSpraycoat 	
PROBLEM 	
3 	
Syringe sensor not working correctly 	
New switch ordered on 11/7. Should be delivered this week. 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
2 	
Voltage cut off during process 	
Installed HV cable on 11/10. System need to be tested 
	
Zygo 	
DOWN 	
1 	
Does not measure 	
Still investigating 
	
	
	
	
	

	
	
	
	
	
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