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[snf-lithography] Litho AM Daily Tools status Report 11/13/14

Mario vilanova at stanford.edu
Thu Nov 13 06:43:21 PST 2014


*/Good morning All../*

*_New Issues_/-/*

*/None-/*

*General Information/Lab Activities*

	

*Thursday, November 13, 2014***

*Gary Sosa*- Extended shift coverage today. Hours: 10:00am -- 7:00pm

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

EVGSpraycoat

	

PROBLEM

	

3

	

Syringe sensor not working correctly

	

*/New switch Arrived!.Will probably
Installed it today./*

	

	

	

	

*//*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

EVBonder

	

PROBLEM

	

2

	

Voltage cut off during process

	

*/Installed HV cable on 11/10. System need to be tested/*

Zygo

	

DOWN

	

1

	

Does not measure

	

*/Still investigating/*

	

	

	

	

*//*

	

	

	

	

*//*

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