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[snf-lithography] Litho Area Tools Status 12/3/15

Mario vilanova at stanford.edu
Thu Dec 3 07:17:37 PST 2015


*/Good morning All../*

*_New Issues_/- /*

/*Developer 1 Wet Back Side Residue.*/

*General Information/Lab Activities*

	

*Thursday, December  03, 2015***

/**//*Gary Sosa Extended Shift 9:30Am - 5:30PM */

**

**

*Tool*

	

*Status*

	

*Priority*

	

*Problem/Comment*

	

*Action Plan/Update*

ASML Stepper

	

UP

	

	

System up with no restrictions

	

*//*

SVGDev2

	

PROBLEM

	

4

	

Backside residue

	

*/Track used for PEB only /*

Yes Oven

	

PROBLEM

	

2

	

Intermittent abort for vacuum failure

	

*/Troubleshooting in progress./*

	

	

	

	

*//*

Miscellaneous

	

	

	

	

*//*

SVGDev1

	

PROBLEM

	

3

	

Backside Residue

	

*/Need to Investigate , Troubleshoot/*

EVBonder

	

DOWN

	

1

	

Turbo/pumping problem

	

*/Need to troubleshoot/*

	

	

	

	

*//*

	

	

	

	

*//*



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