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[snf-lithography] Morning Litho Status 12/8/2015
Gary J Sosa
gsosa at stanford.edu
Tue Dec 8 07:47:50 PST 2015
Good morning All..
Prometrix- User reports an intermittent stage problem
General Information/Lab Activities
Tuesday, December 08, 2015
Mario- Out today(12/8)
System up with no restrictions
Track used for PEB only
Intermittent abort for vacuum failure
Identified a leak in the chamber. System is still operational and under observation. 12/16 is the target date to send the process chamber out for repair
Intermittent stage error
Need to investigate
Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.
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