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[snf-lithography] Morning Litho Status 12/8/2015

Gary J Sosa gsosa at stanford.edu
Tue Dec 8 07:47:50 PST 2015


Good morning All..
New Issues-
Prometrix- User reports an intermittent stage problem
General Information/Lab Activities

Tuesday, December 08, 2015

Mario- Out today(12/8)






Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions



SVGDev2

PROBLEM

4

Backside residue

Track used for PEB only

Yes Oven

PROBLEM

3

Intermittent abort for vacuum failure

Identified a leak in the chamber. System is still operational and under observation. 12/16 is the target date to send the process chamber out for repair











Miscellaneous









  Prometrix

PROBLEM

2

Intermittent stage error

Need to investigate

  EVBonder

DOWN

1

Turbo/pumping problem

Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.











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