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[snf-lithography] Morning Litho Status 12/9/2015
Gary J Sosa
gsosa at stanford.edu
Wed Dec 9 07:50:03 PST 2015
Good morning All..
General Information/Lab Activities
Wednesday, December 09, 2015
System up with no restrictions
Track used for PEB only
Intermittent abort for vacuum failure
Identified a leak in the chamber. System is still operational and under observation. 12/16 is the target date to send the process chamber out for repair
Intermittent stage error
Need to investigate
Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.
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