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[snf-lithography] Morning Litho Status 12/14/2015

Gary J Sosa gsosa at stanford.edu
Mon Dec 14 08:02:35 PST 2015


Good morning All..
New Issues-
SVGCoat2- User reports that track is not transferring wafers
General Information/Lab Activities

Monday, December 14, 2015

Reminder!!
Yes V/P Oven: Important Notice- The Yes Vapor Prime Oven will be shut down on Wednesday, December 16th at 7:00am. The oven will be disassembled and the process chamber sent out for repair. Vapor prime processing can be done on SVG Track 2. Please plan you processing activities accordingly.



Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions



SVGDev2

PROBLEM

4

Backside residue

Track used for PEB only

Yes Oven

PROBLEM

3

Intermittent abort for vacuum failure

Identified a leak in the chamber. System is still operational and under observation. 12/16 is the target date to send the process chamber out for repair

SVGCoat2

PROBLEM

2

Track jamb and not transferring wafers

Need to check out

Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.






















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