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[snf-lithography] Morning Litho Status 12/14/2015
Gary J Sosa
gsosa at stanford.edu
Mon Dec 14 08:02:35 PST 2015
Good morning All..
SVGCoat2- User reports that track is not transferring wafers
General Information/Lab Activities
Monday, December 14, 2015
Yes V/P Oven: Important Notice- The Yes Vapor Prime Oven will be shut down on Wednesday, December 16th at 7:00am. The oven will be disassembled and the process chamber sent out for repair. Vapor prime processing can be done on SVG Track 2. Please plan you processing activities accordingly.
System up with no restrictions
Track used for PEB only
Intermittent abort for vacuum failure
Identified a leak in the chamber. System is still operational and under observation. 12/16 is the target date to send the process chamber out for repair
Track jamb and not transferring wafers
Need to check out
Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.
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