Search Mailing List Archives
[snf-lithography] Morning Litho Status 12/16/2015
Gary J Sosa
gsosa at stanford.edu
Wed Dec 16 07:05:44 PST 2015
Good morning All..
General Information/Lab Activities
Wednesday, December 16, 2015
Yes V/P Oven: Important Notice- The Yes Vapor Prime Oven will be shut down today, Wednesday, December 16th at 7:00am. The oven will be disassembled and the process chamber sent out for repair. Vapor prime processing can be done on SVG Track 2. Please plan you processing activities accordingly.
System up with no restrictions
Track used for PEB only
Intermittent abort for vacuum failure
Identified a leak in the chamber. Disassembling and sending out the chamber today 12/16.
Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the snf-lithography