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[snf-lithography] Morning Litho Status 12/16/2015

Gary J Sosa gsosa at stanford.edu
Wed Dec 16 07:05:44 PST 2015


Good morning All..
New Issues-
None-
General Information/Lab Activities

Wednesday, December 16, 2015

Reminder!!
Yes V/P Oven: Important Notice- The Yes Vapor Prime Oven will be shut down today, Wednesday, December 16th at 7:00am. The oven will be disassembled and the process chamber sent out for repair. Vapor prime processing can be done on SVG Track 2. Please plan you processing activities accordingly.



Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions



SVGDev2

PROBLEM

3

Backside residue

Track used for PEB only

Yes Oven

DOWN

2

Intermittent abort for vacuum failure

Identified a leak in the chamber. Disassembling and sending out the chamber today 12/16.











Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.





















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