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[snf-lithography] Morning Litho Status 12/17/2015
Gary J Sosa
gsosa at stanford.edu
Thu Dec 17 07:54:59 PST 2015
Good morning All..
General Information/Lab Activities
Thursday, December 17, 2015
Lab closed for Winter Shutdown and will re-open on January 5th 2016
Everyone have a happy and safe holiday break. See you all next year. .... The Litho Team
System up with no restrictions
Track used for PEB only
Intermittent abort for vacuum failure
Identified a leak in the chamber. Chamber is out for repair.
Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.
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