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[snf-lithography] Morning Litho Status 12/17/2015

Gary J Sosa gsosa at stanford.edu
Thu Dec 17 07:54:59 PST 2015


Good morning All..
New Issues-
None-
General Information/Lab Activities

Thursday, December 17, 2015

Lab closed for Winter Shutdown and will re-open on January 5th 2016
 Everyone have a happy and safe holiday break. See you all next year.     .... The Litho Team



Tool

Status

Priority

Problem/Comment

Action Plan/Update

ASML Stepper

UP



System up with no restrictions



SVGDev2

PROBLEM

3

Backside residue

Track used for PEB only

Yes Oven

DOWN

2

Intermittent abort for vacuum failure

Identified a leak in the chamber. Chamber is out for repair.











Miscellaneous









  EVBonder

DOWN

1

Turbo/pumping problem

Isolated a large leak in the upper electrode assembly. Working on a repair plan with EVG Tech Support.





















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