Search Mailing List Archives


Limit search to: Subject & Body Subject Author
Sort by: Reverse Sort
Limit to: All This Week Last Week This Month Last Month
Select Date Range     through    

[snf-lithography] Morning Litho Status 1/13/2015

Gary J Sosa gsosa at stanford.edu
Tue Jan 13 07:50:32 PST 2015


Good morning All.. 
New Issues - 
Prometrix- Va/Vb ratio limit errors 
CCI-HD - Mouse is not working 
	
General Information/Lab Activities 	
Tuesday, January 13, 2015 
	
Mario- Out today(1/13) 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
DOWN 	
1 	
Wafer handling and level sensor issues 	
Vendor is bringing in parts to repair the level sensor and wafer handling problems. 
	
EVAlign 	
PROBLEM 	
4 	
Bottom objective not moving in X direction 	
Consulted with tech support. Advised that service visit is required. PO submitted on 1/7 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
5 	
New graphite needs rework 	
Sent back to vendor for further work. 
	
Prometrix 	
PROBLEM 	
2 	
Va/Vb ratio error 	
Need to investigate 
	
CCI-HD 	
PROBLEM 	
3 	
Mouse not working 	
Need to investigate 
	
	
	
	
	
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://mailman.stanford.edu/pipermail/snf-lithography/attachments/20150113/c9e91102/attachment-0001.html>


More information about the snf-lithography mailing list