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[snf-lithography] Morning Litho Status 1/14/2015

Gary J Sosa gsosa at stanford.edu
Wed Jan 14 07:56:43 PST 2015


Good morning All.. 
New Issues - 
None- 


	
General Information/Lab Activities 	
Wednesday, January 14, 2015 
	
Mahnaz - In at 8:30am 

Senofar S Neox: Just a reminder of the presentation Today, at 10 am in Allen 101 by Sensofar engineers about the new S Neox system just installed at SNF. 
This system is an optical profilometer, capable of performing measurements and imaging using interferometry, confocal, and focus variation 
( http://www.sensofar.com/sensofar/products/sneox/ ). 
This new system is located outside the cleanroom, in Allen 155A. This presentation will be followed by hands-on sessions in the afternoon. 
All are welcome. Samples are also welcome. 

	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
DOWN 	
1 	
Wafer handling and level sensor issues 	
Vendors are continuing their work on the level sensor and wafer handling issues. 
	
EVAlign 	
PROBLEM 	
3 	
Bottom objective not moving in X direction 	
Consulted with tech support. Advised that service visit is required. PO submitted on 1/7 
	
	
	
	
	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
5 	
New graphite needs rework 	
Sent back to vendor for further work. 
	
Prometrix 	
PROBLEM 	
4 	
Va/Vb ratio error 	
Reset relay modules and tested. Will continue to monitor and test. OK to use 
	
CCI-HD 	
PROBLEM 	
2 	
Mouse not working 	
Need to investigate 
	
	
	
	
	
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