Search Mailing List Archives
[snf-lithography] Morning Litho Status 1/14/2015
Gary J Sosa
gsosa at stanford.edu
Wed Jan 14 07:56:43 PST 2015
Good morning All..
New Issues -
General Information/Lab Activities
Wednesday, January 14, 2015
Mahnaz - In at 8:30am
Senofar S Neox: Just a reminder of the presentation Today, at 10 am in Allen 101 by Sensofar engineers about the new S Neox system just installed at SNF.
This system is an optical profilometer, capable of performing measurements and imaging using interferometry, confocal, and focus variation
( http://www.sensofar.com/sensofar/products/sneox/ ).
This new system is located outside the cleanroom, in Allen 155A. This presentation will be followed by hands-on sessions in the afternoon.
All are welcome. Samples are also welcome.
Wafer handling and level sensor issues
Vendors are continuing their work on the level sensor and wafer handling issues.
Bottom objective not moving in X direction
Consulted with tech support. Advised that service visit is required. PO submitted on 1/7
New graphite needs rework
Sent back to vendor for further work.
Va/Vb ratio error
Reset relay modules and tested. Will continue to monitor and test. OK to use
Mouse not working
Need to investigate
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the snf-lithography